All-stable-point out ultraviolet lasers are actually greatly Employed in the fields of mechanical flaw detection, lithography, micromachining and drugs for the benefits of modest volume, lengthy daily life, substantial effectiveness, very good beam excellent, extensive tuning and slender spectral line, etc. Employing significant electricity around-infrared coherent light supply as the fundamental frequency resource determined by nonlinear tuning know-how, creating ultraviolet coherent radiation by multistage frequency conversion is considered to be a crucial technique to build the ultraviolet coherent light supply.
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According to the proof-of-principle experiment, the conversion effectiveness of 23% implied the potential for reaching high-electric power at the second Stokes wavelength on the Raman laser. If the pump laser of 1078 nm could possibly be attained at the standard ability of fifty W, the output electric power of its 2nd Stokes wavelength at 1512 nm may very well be in excess of 10 W. The design in the Raman laser cavity needs to be optimized as a way to avoid the harm of the M1 and diamond floor.
As an example, The existing concave OC could get replaced by a plane mirror which could mitigate the facility density to the surface area of M1 and also the diamond. Moreover, applying significant injury threshold coatings for M1 and diamond would also Increase the output electricity with none damages. Then, the NIR laser with the 2nd Stokes wavelength could possibly be high adequate, and its very good beam high quality, to generate the ultimate DUV laser at 193 nm using a higher ordinary energy.
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Due to the thermal lens impact from the sound-state lasers, Should the heating management is inadequate, It's not at all simple to acquire the strong-point out laser having a superior electrical power and a superior beam top quality concurrently. Not long ago, with the development of The skinny disk laser and one-crystal fiber (SCF) laser, a large-ability laser at the fundamental wavelength (1 μm) were realized with a superb beam high-quality even with a TEM00 manner beam [four,24], which might be superior candidates for the elemental of the DUV laser generation. An additional candidate for the fundamental will be the large-electrical power fiber laser which could possibly be realized by coherent beam blend with M2 worth under 1.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics of your Nd:YAG essential laser wavelength. In order to greatly enhance the destruction threshold, very low CLBO floor roughness, by ultra-precision machining, is required. Because the CLBO crystal has simple hydroscopic response and micro scratches in machining, extremely-precise machining of the CLBO crystal is a complicated complex difficulty.
The beam profile shown in Determine 7b demonstrated a fantastic beam high-quality as among the merits of Raman laser, which would be effective to produce a 193-nm DUV laser with a top quality beam.
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The development with the 193-nm laser was demonstrated by phases of SFG. In an effort to scale the DUV laser power properly, a new principle of the 193-nm DUV laser era is offered based on the diamond Raman laser.